Structural, electrical, and optical properties of F-doped SnO or SnO 2 films prepared by RF reactive magnetron sputtering at different substrate temperatures and O 2 fluxes
Author:
Funder
State Key Laboratory of Materials Processing and Die & Mould Technology
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
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5. Properties of Sb-doped SnO2 transparent conductive thin films deposited by radio-frequency magnetron sputtering;Yang;Thin Solid Films,2013
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