The effect of Si content on structural, mechanical and optical behaviour of magnetron sputtered Al–Si–N nanocomposite thin films
Author:
Funder
CSIR
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
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3. Microstructure evolution and mechanical behavior of magnetron sputtering AlN–Al nanostructured composite film;Ceramics International;2024-02
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