Linearity tests of silicon photodiodes for EUV radiation
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference12 articles.
1. EXTATIC: ASML's α-tool development for EUVL
2. High-accuracy radiometry in the EUV range at the PTB soft x-ray beamline
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4. Present status of radiometric quality silicon photodiodes
5. Response of a silicon photodiode to pulsed radiation
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