Predicting plastic and fracture properties of silicon oxycarbide thin films using extended finite element method

Author:

Deng Jixi,Liao NingboORCID,Zhou Hongming,Xue Wei

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

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4. Nanoindentation and stress analysis of Si-based N/MEMS;Materials Today: Proceedings;2022

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