Electrical, optical and structural properties of transparent and conducting ZnO thin films doped with Al and F by rf magnetron sputter
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Ceramics and Composites
Reference12 articles.
1. Highly conductive and transparent aluminum-doped zinc oxide thin films prepared by pulsed laser deposition in oxygen ambient;Singh;J. Appl. Phys.,2001
2. Prperties of transparent conductive ZnO:Al thin films prepared by magnetron sputtering;Fu;Microelectron. J.,2004
3. Magnetron sputtering of transparent conductive zinc oxide: relation between the sputtering parameters and the electronic properties;Ellmer;J. Phys. D: Appl. Phys.,2000
4. ZnO:F thin films deposited by chemical spray: effect of the fluorine concentration in the starting solution;Olvera;Sol. Energy Mater. Sol. Cells,2002
5. Textured fluorine-doped ZnO films by atmospheric pressure chemical vapor deposition and their use in amorphous silicon solar cells;Hu;Sol. Cells,1991
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