A review on laser drilling and cutting of silicon
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Ceramics and Composites
Reference163 articles.
1. Laser drilling of structural ceramics-a review;Wang;J. Eur. Ceram. Soc.,2017
2. Experimental analysis of Nd-YAG laser cutting of sheet materials-a review;Sharma;Opt. Laser Technol.,2018
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4. Enhancement of surface area and wettability properties of boron doped diamond by femtosecond laser-induced periodic surface structuring;Granados;Opt. Mater. Express,2017
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