Fabrication of membranes and microchannels in low-temperature co-fired ceramic (LTCC) substrate using novel water-based sacrificial carbon pastes

Author:

Malecha Karol,Maeder Thomas,Jacq Caroline

Funder

Polish National Science Centre

Wrocław University of Technology

Publisher

Elsevier BV

Subject

Materials Chemistry,Ceramics and Composites

Reference26 articles.

1. Multichip module technology handbook;Garron,1998

2. High temperature characteristics of various LTCC-tapes;Unger,2009

3. Properties of laser cut LTCC heaters;Kita;Microelectron Reliab,2000

4. Sensors and packages based on LTCC and thick-film technology for severe conditions;Jacq;SĀDHANĀ Acad Proc Eng Sci,2009

5. Studies on three-dimensional moulding, bonding and assembling of low-temperature-cofired ceramics for MEMS and MST applications;Khanna;Mater Chem Phys,2005

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