Technological challenges in manufacturing of vacuum gauge thermionic cathode using thick-film technology-Reference-Cited by-同舟云学术

Technological challenges in manufacturing of vacuum gauge thermionic cathode using thick-film technology

Published:2024-03-01 Issue:1 Volume:42 Page:126-139
ISSN:2083-134X
Container-title:Materials Science-Poland
language:en
Short-container-title:

Author:

Jasińska Laura¹,Dzbik Krzysztof¹,Nowak Damian¹,Stojek Krzysztof¹,Chudzyńska Aleksandra²,Politański Kamil²,Malecha Karol¹

Affiliation:

1. Wrocław University of Science and Technology, Faculty of Electronics, Photonics and Microsystems , Wybrzeże Wyspiańskiego 27 , Wrocław , Poland

2. Nanores Sp. z o. o. Sp. k. , Bierutowska 57-59 , Wrocław , Poland

Abstract

Abstract This paper focuses on the development of a technological challenges of manufacturing the planar ceramic vacuum sensor based on the principles of hot-cathode ionization in the Bayard-Alpert configuration. The goal is to simplify the technological process by utilizing planar platinum structures with gold electrical paths instead of 3-dimensional structures. Various methods were tested, including the use of carbon-based SVM (Sacrifice Volume Materials) materials, but without success. Wet-etching using potassium hydroxide on Al2O3 substrates showed promise results. The findings highlight the challenges and progress made in developing the thermo-emittercomponent of the vacuum sensor.

Publisher

Walter de Gruyter GmbH

Link

https://www.sciendo.com/pdf/10.2478/msp-2024-0007

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