Low-temperature crystallization of tantalum pentoxide films under elevated pressure
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Ceramics and Composites
Reference22 articles.
1. Tantalum oxide thin films for dielectric applications by low pressure chemical vapor deposition physical and electrical properties;Hitchens;J. Electrochem. Soc.,1993
2. Process and device technologies for 1Gbit dynamic random-access memory cells;Kaga;J. Vac. Sci. Technol.,1995
3. Leakage-current reduction in thin Ta2O5 films for high-density VLSI memories;Hasimoto;IEEE Trans. Electron Devices,1989
4. Alpha-Ta2O5: an intrinsic fast oxygen ion conductor;Choi;J. Electrochem. Soc.,1989
5. Optical propagation in sheet and pattern generated films of Ta2O5;Hensler;Appl. Opt.,1971
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