In-situ ellipsometric and XPS studies on RF sputter cleaning and re-oxidation of thin Nb films
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Published:1985-01
Issue:3
Volume:20
Page:307-316
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ISSN:0378-5963
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Container-title:Applications of Surface Science
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language:en
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Short-container-title:Applications of Surface Science
Author:
Ermolieff A.,Dugourd H.
Subject
General Engineering
Cited by
1 articles.
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