Electron beam induced effects at silicon-transition metal silicide interfaces
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference6 articles.
1. Palladium silicide formation observed by Auger electron spectroscopy
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4. Pt2Si and PtSi formation with high‐purity Pt thin films
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
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2. Phase nucleation and stability in irradiated metal-silicon systems;Zeitschrift f�r Physik B Condensed Matter;1989-06
3. Auger electron spectroscopy study of low coverage palladium adsorption on Si(111);Thin Solid Films;1989-05
4. Comparative AES and RHEED study of the formation of Pd silicide on clean and oxide covered Si(100) and (111) surfaces;Applied Surface Science;1987-11
5. Surface analysis: x-ray photoelectron spectroscopy and Auger electron spectroscopy;Analytical Chemistry;1986-04-01
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