In situ investigation of ion drift processes in glass during anodic bonding-Reference-Cited by-同舟云学术

In situ investigation of ion drift processes in glass during anodic bonding

Published:1998-05 Issue:1-3 Volume:67 Page:191-198
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Schmidt B.,Nitzsche P.,Lange K.,Grigull S.,Kreissig U.,Thomas B.,Herzog K.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference20 articles.

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2. Bonding of structured wafers;Baumann,1995

3. Electrode ‘polarization’ in alkali-containing glasses;Carlson;J. Am. Ceram. Soc.,1972

4. The mechanism of field-assisted silicon-glass bonding;Kanda;Sensors and Actuators A,1990

5. Rate processes during anodic bonding;Albaugh;J. Am. Ceram. Soc.,1992

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