Dynamic actuation of polyimide V-groove joints by electrical heating-Reference-Cited by-同舟云学术

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Dynamic actuation of polyimide V-groove joints by electrical heating

Published:1998-05 Issue:1-3 Volume:67 Page:199-204
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Ebefors Thorbjörn,Kälvesten Edvard,Stemme Göran

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Microfabricated hinges;Pister;Sensors and Actuators A,1992

2. Actuation of polysilicon surface-micromachined mirrors;Tien,1996

3. Self-assembled microactuated XYZ stages for optical scanning and alignment;Fan,1997

4. Design, fabrication, and testing of a C-shape actuator;Lin,1995

5. CMOS drivable electostatic microactuator with large deflection;Yasuda,1997

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