Organic thermal and electrostatic ciliary microactuator array for object manipulation

Author:

Suh John W,Glander Steven F,Darling Robert B,Storment Christopher W,Kovacs Gregory T.A

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. K.-F. Bohringer, B.R. Donald, R. Mihailovich and N.C. MacDonald, A theory of manipulation and control for microfabricated actuator arrays, Proc. IEEE Micro Mechanical Systems. MEMS '94, pp. 102–107.

2. Single-crystal silicon actuator arrays for micro manipulator tasks;Böhringer,1996

3. A micromachined permalloy magnetic actuator array for micro robotics assembly systems;Liu,1995

4. Polyimide bimorph actuators for a ciliary motion system;Takeshima,1991

5. A planar air levitated electrostatic actuator system;Pister,1990

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