Microtribological studies of doped single-crystal silicon and polysilicon films for MEMS devices-Reference-Cited by-同舟云学术

Microtribological studies of doped single-crystal silicon and polysilicon films for MEMS devices

Published:1996-11 Issue:2 Volume:57 Page:91-102
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Bhushan Bharat,Koinkar Vilas N.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference51 articles.

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4. IC-processed electrostatic micromotors;Fan;Sensors and Actuators,1989

5. Electrostatically balanced comb drive for controlled levitation;Tang,1990

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