Self-excited force-sensing microcantilevers with piezoelectric thin films for dynamic scanning force microscopy-Reference-Cited by-同舟云学术

Self-excited force-sensing microcantilevers with piezoelectric thin films for dynamic scanning force microscopy

Published:1996-06 Issue:1-3 Volume:54 Page:477-481
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Itoh Toshihiro,Suga Tadatomo

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Development of a force sensor for atomic force microscopy using piezoelectric thin films;Itoh;Nanotechnology,1993

2. Scanning force microscope using a piezoelectric microcantilever;Itoh;J. Vac. Sci. Technol. B,1994

3. Sol-gel derived PZT force sensor for scanning force microscopy;Lee,1994

4. Scanning force microscope using piezoelectric excitation and detection;Itoh;IEICE Trans. Electron.,1995

5. Atomic force microscopy using a piezoresistive cantilever;Tortonese,1991

Cited by 41 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Rapid, autonomous high-throughput characterization of hydrogel rheological properties via automated sensing and physics-guided machine learning;Applied Materials Today;2023-02

2. Vibration and sensitivity analysis of double-layered non-uniform piezoelectric microcantilever as a self-sensing mass sensor;Physica Scripta;2021-07-20

3. The effect of surfaces type on vibration behavior of piezoelectric micro-cantilever close to sample surface in a humid environment based on MCS theory;Applied Physics A;2016-07-30

4. Piezoelectric thin films: an integrated review of transducers and energy harvesting;Smart Materials and Structures;2016-04-05

5. Analyzing the Effect of Capillary Force on Vibrational Performance of the Cantilever of an Atomic Force Microscope in Tapping Mode with Double Piezoelectric Layers in an Air Environment;Microscopy and Microanalysis;2015-09-01