A practical microgripper by fine alignment, eutectic bonding and SMA actuation-Reference-Cited by-同舟云学术

A practical microgripper by fine alignment, eutectic bonding and SMA actuation

Published:1996-06 Issue:1-3 Volume:54 Page:755-759
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Lee Abraham P.,Ciarlo Dino R.,Krulevitch Peter A.,Lehew Stacy,Trevino Jimmy,Northrup M.Allen

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Silicon electromechanical microgrippers: design, fabrication and testing;Kim,1991

2. Microfabricated tweezers with a large gripping force and a large range of motion;Chu,1994

3. Analysis of closed-loop control of parallel-plate electrostatic microgrippers;Chu,1994

4. Integrated fabrication of polysilicon mechanisms;Mehregany;IEEE Trans. Electron Devices,1988

5. Selective chemical vapor deposition of tungsten for microdynamic structures;Chen,1989

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