A miniaturized magnetic-field sensor system consisting of a planar fluxgate sensor and a CMOS readout circuitry

Author:

Gottfried-Gottfried R,Budde W,Jähne R,Kück H,Sauer B,Ulbricht S,Wende U

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference4 articles.

1. CMOS-compatible integration of thin ferromagnetic films;Sauer;Sensors and Actuators A,1994

2. S. Kawahito, Y. Sasaki, M. Ishida and T. Nakamura, A fluxgate magnetic sensor with micromachined solenoids and electroplated cores, Proc. 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, 7–10 June, 1993, pp. 888–891.

3. B. Sauer, Th. Haase and R. Gottfried-Gottfried, Fluxgate Sensor in CMOS-kompatibler Planartechnologie, Sensoren: Technologie und Anwendung, Bad Nauheim, Germany, March 1994, ITG-Fachbericht 126, pp. 441–446.

4. R. Jähne, W. Budde, R. Gottfried-Gottfried, T. Hörning, B. Sauer and S. Ulbricht, Ein CMOS-ASIC für den Betrieb eines planaren Fluxgate Magnetometers, Mikroelektronik, Baden-Baden, Germany, 20–22 March, 1995, GME-Fachbericht 15, pp. 413–418.

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