Author:
Luginbuhl Ph,Racine G.-A,Lerch Ph,Romanowicz B,Brooks K.G,de Rooij N.F,Renaud Ph,Setter N
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. Development of a force sensor for atomic force microscopy using piezoelectric thin films;Itoh;Nanotechnology,1993
2. Piezoelectric response of PZT thin film actuated micromachined silicon cantilever beams;Brooks,1994
3. PZT films for micropumps;Brooks,1994
4. Hybrid ultrasonic elastic force motors micromachined in silicon;Racine,1994
5. The constituents equations of piezoelectric heterogeneous bimorphs;Smits;IEEE Trans. Ultrasonics, Ferroelectrics, Freq. Control,1991
Cited by
83 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献