Heat transfer in a MEMS for microfluidics

Author:

Damean Nicolae,Regtien Paul P.L.,Elwenspoek Miko

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference32 articles.

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2. K. Petersen, J. Brown, High-precision, high-performance mass-flow sensor with integrated laminar flow in micro-channels, in: Proceedings of Transducers’85, 1985, pp. 361–363.

3. Measurement concepts—from classical transducers to new MEMS;Damean;Measurement,2000

4. J. van Baar, R.J. Wiegerink, G.J.M. Krijnen, T.S.J. Lammerink, M.C. Elwenspoek, Sensitive thermal flow sensor based on a micro-machined two-dimensional resistor array, in: Proceedings of the 11th International Conference on Solid-State Sensors and Actuators, Munich, Germany, 2001.

5. J. van Baar, R.J. Wiegerink, G.J.M. Krijnen, T.S.J. Lammerink, M.C. Elwenspoek, Distributed flow sensor based on a micro-machined resistor array, Sens. Actuators A, submitted for publication.

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