Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array-Reference-Cited by-同舟云学术

Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array

Published:2001 Issue: Volume: Page:1408-1411
ISSN:
Container-title:Transducers ’01 Eurosensors XV
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Author:

van Baar J. J.,Wiegerink R. W.,Krijnen G. J. M.,Lammerink T. S. J.,Elwenspoek M.

Publisher

Springer Berlin Heidelberg

Link

http://link.springer.com/content/pdf/10.1007/978-3-642-59497-7_332

Reference9 articles.

1. A. Leung J. Jones E. Czyzewska J. Chen and M. Pascal. Micromachined accelerometer with no proof mass. IEDM Washington DC, pages 899–902, 1997.

2. T.S.J. Lammerink N.R. Tas G.J.M. Krijnen and M. Elwenspoek. A new class of temperaturee flow sensors using δt=0 as control signal. MEMS conference, Miyazaki, Japan, pages 525–530, 2000.

3. S. Billat et. al. Convection-based micromachined inclinometer using soi technology. MEMS, pages 159–162, 2001.

4. H.E. de Bree et. al. The microflown. Sensors and Actuators, A 54:552–557, 1996.

5. J. van Kuijk. Multi-parameter detection in fluid flows. Sensors and Actuators, A 46–47:369–372, 1995.

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