A high Q, large tuning range MEMS capacitor for RF filter systems-Reference-Cited by-同舟云学术

A high Q, large tuning range MEMS capacitor for RF filter systems

Published:2003-01 Issue:1-2 Volume:103 Page:33-41
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Borwick Robert L.,Stupar Philip A.,DeNatale Jeffrey,Anderson Robert,Tsai Chialun,Garrett Kathleen,Erlandson Robert

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. D.J. Young, B.E. Boser, A Micro-Machined Variable Capacitor for Monolithic Low-Noise VCOs, Technical Digest of Solid State Sensors and Actuators Workshop, Hilton Head Island, SC, USA, June 1996, pp. 86–89.

2. J. Yoon, C. Nguyen, A High-Q Tunable Micro-Mechanical Capacitor with Movable Dielectric for RF Applications, Technical Digest of the International Electron Devices Meeting, 2000, pp. 489–492.

3. Z. Feng, H. Zhang, W. Zhang, B. Su, K. Gupta, V. Bright, Y. Lee, MEMS-Based Variable Capacitor for Millimeter-Wave Applications, Technical Digest of Solid State Sensors and Actuators Workshop, Hilton Head Island, SC, USA, 4–8 June 2000, pp. 255–258.

4. J. Zou, C. Liu, J.E. Schutt-Ainé, J. Chen, S. Kang, Development of a Wide Tuning Range MEMS Tunable Capacitor for Wireless Communication Systems, Technical Digest of International Electron Devices Meeting, Hilton Head Island, SC, USA, 4–8 June 2000, pp. 403–406.

5. R. Borwick, P. Stupar, J. DeNatale, R. Anderson, C. Tsai, K. Garrett, A high-Q, large tuning range tunable capacitor for RF applications, in: Proceedings of MEMS 2002, Las Vegas, NV, USA, 20–24 January 2002, pp. 669–672.

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