Theoretical and experimental study of linear motors using surface acoustic waves

Author:

Hélin Philippe,Sadaune Véronique,Druon Christian

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. A levitation-type linear synchronous micro-actuator using the Meissner effect of high-Tc superconductors;Kim;Sensors and Actuactors A,1991

2. A conveyance system using air flow based on the concept of distributed micro-motion systems;Konishi;J. Micro-Electromechanical Syst.,1994

3. Fabrication and operation of polyimide bimorph actuators for a ciliary motion system;Ataka;J. Micro-Electromechanical Syst.,1993

4. Ultrasonic Motors, Theory and Applications;Ueha,1993

5. Ultrasonic Micro-motors, Proc. IEEE Ultrasonic Symposium;Moroney,1989

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