Optimization of an integrated SnO2 gas sensor using a FEM simulator-Reference-Cited by-同舟云学术

Optimization of an integrated SnO2 gas sensor using a FEM simulator

Published:1998-09 Issue:3 Volume:69 Page:205-211
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Astié S.,Gué A.M.,Scheid E.,Lescouzères L.,Cassagnes A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. SnO2 sensors: current status and future prospects;Göpel;Sensors and Actuators B,1995

2. Thermal management of integrated microsensors;Crary;Sensors and Actuators,1987

3. E. Anderheggen, J.G. Korvink, M. Roos, S. Sartois, H.U. Schwarzenbach, NM-SESES User Manual, Numerical Modelling, Thalwil, Switzerland.

4. Applications of thermal silicon sensors on membranes;Gadja;Sensors and Actuators A,1995

5. Réalisation d'un capteur de gas intègre sur silicium: étude des méchanismes physico-chimiques liés au fonctionnement de ces capteurs dans le cas de couches minces de dioxyde d'étain pur et dopé;Demarne,1991

Cited by 38 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Model-Based Optimization of Solid-Supported Micro-Hotplates for Microfluidic Cryofixation;Micromachines;2024-08-24

2. Microheaters for Thermal Analysis and Gas Sensing Applications;Sensors and Materials;2024-05-15

3. Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters;Journal of Microelectromechanical Systems;2022-06

4. Neural Network Robustness Analysis Using Sensor Simulations for a Graphene-Based Semiconductor Gas Sensor;Chemosensors;2022-04-21

5. 3D finite element simulation model of a chemiresistor gas sensor based on ZnO and graft comb copolymer integrated in a gas chamber;Journal of Materials Science: Materials in Electronics;2022-01-19