Silicon compatible materials for harsh environment sensors

Author:

Kroetz Gerhard H.,Eickhoff Martin H.,Moeller Helmut

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference31 articles.

1. Y. Hase, M. Bessho, T. Ipposhi, SOI type pressure sensor for high temperature pressure measurement, in: R.K. Jurgen (Ed.), Sensors and Transducers, Progress in Technology, Automotive Electronics Series PT-68 (1997) 35–39.

2. M. Eickhoff, P. Reinhardt, G. Kroetz, Accelerated Aging of Micromachined Silicon/Silicon Carbide Diaphragms by the Application of Pressure and Temperature, Proc. 2nd Micro Materials Berlin (1997) 955.

3. G. Kroetz, W. Wondrak, M. Eickhoff, V. Lauer, E. Obermeier, G. Cavalloni, New High-Temperature Sensors for Innovative Engine Management, Proc. Adv. Microsystems for Automotive Applications '98 Berlin, Springer, Heidelberg (1998) 223.

4. M. Takeuchi et al., SAE Technol. Paper Series 930351.

5. `SIMOX' (Separation by Ion Implantation of Oxygen): a technology for high-temperature silicon sensors;Diem;Sensors and Actuator A,1990

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