III–V Compound semiconductor micromachined actuators for long resonator tunable fabry-pérot detectors-Reference-Cited by-同舟云学术

III–V Compound semiconductor micromachined actuators for long resonator tunable fabry-pérot detectors

Published:1998-06 Issue:1-3 Volume:68 Page:365-371
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Dehé A.,Peerlings J.,Pfeiffer J.,Riemenschneider R.,Vogt A.,Streubel K.,Künzel H.,Meissner P.,Hartnagel H.L.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. GaAs micromachined widely tunable Fabry-Pérot filters;Vail;Electron. Lett.,1995

2. Surface micromachined GaAs-AlAs Fabry-Pérot tunable filter;Tran;IEEE Photon-ics Technol. Lett.,1996

3. Telecoms mix wavelengths to boost markets;Chaffee;Photonics Spectra, (Aug.),1996

4. Long resonator micromachined tunable GaAs/AlAs Fabry-Pérot filter;Peerlings;IEEE Photonics Technol. Lett.,1997

5. Freestanding AlGaAs thermopiles for improved sensor design;Dehé;IEEE Trans. Electron Devices,1996

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