Jet molding system for realization of three-dimensional micro-structures-Reference-Cited by-同舟云学术

Jet molding system for realization of three-dimensional micro-structures

Published:1998-06 Issue:1 Volume:69 Page:106-112
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Akedo J.,Ichiki M.,Kikuchi K.,Maeda R.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. D. Munchmeyer;Becker;Micro-electron. Eng.,1986

2. J. Mohr;Wallrabe,1992

3. T.W. Chapman;Guckel;J. Micromech. Microeng,1991

4. T. Suga;Lee,1996

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