Design of two-dimensional micromachined gyroscope by using nickel electroplating-Reference-Cited by-同舟云学术

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Design of two-dimensional micromachined gyroscope by using nickel electroplating

Published:1998-04 Issue:1-3 Volume:66 Page:173-177
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Fujita T.,Maenaka K.,Maeda M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Silicon monolithic micromechanical gyroscope;Greiff,1991

2. Silicon rate sensor using anisotropic etching technology;Maenaka,1993

3. A micromachined vibratory ring gyroscope;Putty,1994

4. A packaged silicon MEMS vibratory gyroscope for microspacecraft;Tang,1996

5. Analysis and design concept of highly sensitive silicon gyroscope;Maenaka,1995

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design and simulation of a dual-axis sensing decoupled vibratory wheel gyroscope;Sensors and Actuators A: Physical;2006-01

2. Lumped-Parameter Inertia Model for Flexure Hinges;Mechanics Based Design of Structures and Machines;2004-12-31

3. A novel micromachined vibrating rate-gyroscope with optical sensing and electrostatic actuation;Sensors and Actuators A: Physical;2000-05

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