A novel micromachined vibrating rate-gyroscope with optical sensing and electrostatic actuation-Reference-Cited by-同舟云学术

A novel micromachined vibrating rate-gyroscope with optical sensing and electrostatic actuation

Published:2000-05 Issue:1-3 Volume:83 Page:54-60
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Bochobza-Degani Ofir,Seter Dan J,Socher E,Nemirovsky Y

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. Silicon monolithic micromechanical gyroscope;Greiff,1991

2. Microelectromechanical instrument and systems development at the Charles Stark Draper Laboratory;Weinberg,1997

3. A silicon membrane gyroscope with electrostatic actuation and sensing;Wood,1995

4. A micromachined vibrating gyroscope;Tanaka;Sens. Actuators, A,1995

5. An electroformed CMOS integrated angular rate sensor;Chang;Sens. Actuators, A,1998

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