Low-pressure-encapsulated resonant structures with integrated electrodes for electrostatic excitation and capacitive detection-Reference-Cited by-同舟云学术

Low-pressure-encapsulated resonant structures with integrated electrodes for electrostatic excitation and capacitive detection

Published:1998-04 Issue:1-3 Volume:66 Page:160-166
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Corman Thierry,Enoksson Peter,Stemme Göran

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Resonant silicon sensors;Stemme;J. Micromech. Microeng,1991

2. Silicon resonant accelerometer;Hashimoto,1995

3. Resonant silicon structures;Buser;Sensors and Actuators,1989

4. Silicon resonator sensors: interrogation techniques and characteristics;Tudor,1988

5. Electrostatically driven vacuum-encapsulated polysilicon resonators. Part II. Theory and performance;Tilmans;Sensors and Actuators A,1994

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