Comparative evaluation of drying techniques for surface micromachining

Author:

Kim Chang-Jin,Kim John Y.,Sridharan Balaji

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Class note, Microelectromechanical Systems (MEMS) : Mech and AE 280, University of California, Los Angeles (UCLA). See also Micro Electro Mechanical Systems (MEMS), a short course offered by UCLA Extension, 10995 Le Conte Avenue, Los Angeles, CA 90024

2. On Size and Life;McMahon,1983

3. The effect of release-etch processing on surface microstructure stiction;Alley,1992

4. Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms;Legtenberg;Sensors and Actuators A,1994

5. Mechanical stability and adhesion of microstructures under capillary forces — Part I: basic theory;Mastrangelo;J. Microelectromech. Syst.,1993

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