Magnetostrictive actuation in microsystems-Reference-Cited by-同舟云学术

Magnetostrictive actuation in microsystems

Published:2000-04 Issue:1-3 Volume:81 Page:275-280
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Quandt Eckhard,Ludwig Alfred

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference24 articles.

1. Materials development for thin film actuators;Quandt;Microsyst. Technol.,1995

2. T. Honda, K.I. Arai, M. Yamaguchi, Fabrication of actuators using magnetostrictive thin films, Proceedings MEMS 1994, Oiso (Japan) 1994, p. 51.

3. G. Flik, M. Schnell, F. Schatz, M. Hirscher, Giant magnetostrictive thin film transducers for microsystems, Proceedings Actuator 94, Bremen (Germany) 1994, p. 232.

4. Fabrication of small flying machines using magnetic thin films;Arai;IEEE Trans. Magn.,1995

5. J. Betz, K. Mackay, J.-C. Peuzin, B. Halstrup, N. Lhermet, Torsion based, drift-free magnetostrictive microactuators, Proceedings Actuator 96, Bremen (Germany) 1996, p. 283.

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