Materials development for thin film actuators

Author:

Quandt E.,Holleck H.

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Benecke, W.; Riethmüller, W.: (1989) Applications of Siliconmicroactuators based on bimorph structures, Proc. IEEE Micro Electro Mechanical Systems 1989, Salt Lake City 20.-22.2.1989, pp. 116?120

2. Bley, P.;Bacher, W.;Menz, W.;Mohr, J.: (1991) Description of microstructures in LIGA-technology, Microelectronic Engineering 13: 509?512

3. Clark, A.E.: (1980) Magnetostrictive rare earth-Fe2 compounds, in: Wohlfarth, E.P. (ed.) Ferromagnetic Materials, Vol. 1, pp. 531-5??. Amsterdam: North Holland

4. Flik, G.; Schnell, M.; Schatz, F.; Hirscher, M.: (1994) Giant magnetostrictive thin film transducers for microsystems, Proc. ACTUATOR 94, AXON Technologie Consult GmbH (ed.), Bremen, 15.17.6.1994, pp. 232?235

5. Holleck, H.: (1988) Metastable coatings-prediction of constitution and structure, Surf. Coat. Techn. 36: 151?159

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