Disk-shaped bulk micromachined gyroscope with vacuum sealing-Reference-Cited by-同舟云学术

Disk-shaped bulk micromachined gyroscope with vacuum sealing

Published:2000-05 Issue:1-3 Volume:82 Page:198-204
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Fujita T,Maenaka K,Mizuno T,Matsuoka T,Kojima T,Oshima T,Maeda M

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Micromachined inertial sensors;Yazdi;Proc. IEEE,1998

2. Commercial vision of silicon-based inertial sensors;Song;Sensors and Actuators A,1998

3. Dual-axis operation of a micromachined rate gyroscope;Juneau;Dig. Tech. Pap. IEEE Int Conf. Solid-State Sens. Actuators,1998

4. A new silicon rate gyroscope;Geiger;Proc. IEEE Micro Electro Mechanical Systems Workshop (MEMS '98),1998

5. Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass;Maenaka;Sensors and Actuators A,1996

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