Author:
Fujita T,Maenaka K,Mizuno T,Matsuoka T,Kojima T,Oshima T,Maeda M
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. Micromachined inertial sensors;Yazdi;Proc. IEEE,1998
2. Commercial vision of silicon-based inertial sensors;Song;Sensors and Actuators A,1998
3. Dual-axis operation of a micromachined rate gyroscope;Juneau;Dig. Tech. Pap. IEEE Int Conf. Solid-State Sens. Actuators,1998
4. A new silicon rate gyroscope;Geiger;Proc. IEEE Micro Electro Mechanical Systems Workshop (MEMS '98),1998
5. Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass;Maenaka;Sensors and Actuators A,1996
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21 articles.
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