Affiliation:
1. Beijing Institute of Technology
Abstract
The comb-shaped capacitive micro-machined gyroscope employing an electrostatic comb drive and capacitive sensing structure is a typical type of MEMS sensor. Because of design and processing limitation and other factors, there are problems related to parallelism, dimensional accuracy and shape accuracy of the fabricated comb capacitor. These problems induce error into the calculation of the capacitance of the comb capacitor. The capacitance of the comb capacitor can be better calculated by the modeling the corner effect with various equipotential lines.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference10 articles.
1. Li Jinming. Design of capacitive micro-machined gyroscope. Defense Industry Press, Beijing (2006).
2. J. Bernstein, S. Cho, A. T. King, A. Kourepenis, P. Maciel, and M. Weinberg. A micromachined comb-drive tuning fork rate gyroscope. in Proc. IEEE Micro-electro-mechanical Systems, Fort Lauderdale, (1993), pp.143-148.
3. T. Fujita, K. Maenaka, T. Mizno, T. Muraoka, T. Kjima,. T. Oshima and M. Maeda. Disk-shaped bulk micromachined. gyroscope with vacuume sealing. Sensors and Actuators, Vol. 82 (2000), pp.198-205.
4. F. Ayazi and K. Najafi. High Aspect-Ratio Combined Poly and Single-Crystal Silicon (HARPSS) MEMS Technology. Journal of Microelectromechanical Systems, Vol. 9 (2000), pp.288-294.
5. L IU W , XIE X H , L I SH Y. Present state and perspectives of micromachined inertial sensors. Opt. Precision Eng. , Vol. 11 (2003), pp.425-431. (in Chinese).