Silicon micro optical switching device with an electromagnetically operated cantilever-Reference-Cited by-同舟云学术

Silicon micro optical switching device with an electromagnetically operated cantilever

Published:2000-05 Issue:1-3 Volume:83 Page:220-224
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Matsuura Tsukasa,Fukami Tatsuya,Chabloz Martial,Sakai Yuichi,Izuo Shin-ichi,Uemura Aritomo,Kaneko Shin-ichi,Tsutsumi Kazuhiko,Hamanaka Koichi

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference4 articles.

1. Surface-micromachined free-space fiber optic switches with integrated microactuators for optical fiber communication systems;Lee;Transducers '97, Digest of Technical Papers,1997

2. An electromagnetic MEMS 2×2 fiber optic bypass switch;Miller;Transducers '97, Digest of Technical Papers,1997

3. Silicon micromechanics for the fiber-optic information highway;Marxer;Sens. Mater.,1998

4. Licensed from Robert Bosch, patent number 5501893, issued March 26, 1996.

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study of Dynamics in Metallic MEMS Cantilevers—Pull-In Voltage and Actuation Speed;Applied Sciences;2023-01-13

2. Nonlinear-optical switching in gold nanoparticles driven by magneto-optical effects exhibited by carbon nanotubes;Sensors and Actuators A: Physical;2018-08

3. A compact electromagnetic micro-actuator using the meander springs partially exposed to magnetic field;Microsystem Technologies;2014-04-23

4. Effect of Thin Films on Dynamic Performance of Resonating MEMS;Experimental Mechanics;2013-10-24

5. A Four-Discrete-Position Electromagnetic Actuator: Modeling and Experimentation;IEEE/ASME Transactions on Mechatronics;2010-02