Surface-micromachined polysilicon MOEMS for adaptive optics-Reference-Cited by-同舟云学术

Surface-micromachined polysilicon MOEMS for adaptive optics

Published:1999-01 Issue:1 Volume:78 Page:54-62
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Comtois John,Michalicek Adrian,Cowan William,Butler Jeffrey

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. D.A. Koester, R. Mahadevan and K.W. Markus, Multi-User MEMS Process (MUMPS) Introduction and Design Rules, Rev. 4, July 15, 1996, MCNC MEMS Technology Applications Center, 3021 Cornwallis Road, Research Triangle Park, NC, 27709.

2. Surface-micromachined microengine;Garcia;Sensors and Actuators A,1995

3. World Wide Web site for MCNC: http://www.mcnc.org.

4. World Wide Web site for Sandia National Lab SUMMiT process: http://www.mdl.sandia.gov/micromachine/.

5. Deformable mirror light modulators for image processing;Boysel;Proc. SPIE,1989

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Holography using pixelated spatial light modulators—part 1: theory and basic considerations;Journal of Micro/Nanolithography, MEMS, and MOEMS;2015-09-16

2. Simulation and Characterization of a Novel Large Stroke Micromirror;Advanced Materials Research;2011-11

3. Optimization designed large-stroke MEMS micromirror for adaptive optics;Chinese Optics Letters;2010

4. Novel approach for microassembly of three-dimensional rotary MOEMS mirrors;Journal of Micro/Nanolithography, MEMS, and MOEMS;2009-10-01

5. Status and prospects of micro- and nanoelectromechanics;Optoelectronics, Instrumentation and Data Processing;2009-06