An industrial CMOS process family adapted for the fabrication of smart silicon sensors-Reference-Cited by-同舟云学术

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An industrial CMOS process family adapted for the fabrication of smart silicon sensors

Published:2000-08 Issue:1-2 Volume:84 Page:126-133
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Müller T,Brandl M,Brand O,Baltes H

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference24 articles.

1. Smart sensors;Giachino;Sensors and Actuators, A,1986

2. Integrated signal conditioning for silicon pressure sensors;Borky;IEEE Transactions on Electron Devices,1979

3. MPX4100, MPX4101 Series, Manifold Absolute Pressure Sensors, Data Sheet, Motorola, 1995.

4. SMD 022, Absolute Pressure Sensor, Data Sheet, Robert Bosch, Germany, 1997.

5. ADXL50, Monolithic Accelerometer with Signal Conditioning, Data Sheet, Analog Devices, 1996.

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