Deep electrochemical trench etching with organic hydrofluoric electrolytes-Reference-Cited by-同舟云学术

Deep electrochemical trench etching with organic hydrofluoric electrolytes

Published:2001-01 Issue:3 Volume:88 Page:241-246
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Christophersen M.,Merz P.,Quenzer J.,Carstensen J.,Föll H.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference28 articles.

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