A novel and low-cost multi-stage approach for the fabrication of silicon nano-structures-Reference-Cited by-同舟云学术

A novel and low-cost multi-stage approach for the fabrication of silicon nano-structures

Published:2013-09 Issue: Volume:199 Page:209-215
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Yaghootkar Bahareh,Amouzgar Mahmoud,Kahrizi Mojtaba

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

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4. Toward the formation of three-dimensional nano-structures by electrochemical etching of silicon;Kleimann;Applied Physics Letters,2005

5. Electrochemical etching in HF solution for silicon micromachining;Barillaro;Sensors and Actuators A,2002

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1. Formation Mechanism of Silicon Nanowires Using Chemical/Electrochemical Process;IEEE Transactions on Nanotechnology;2017-05

2. Promising method toward realization of ultra-low-cost silicon microrod array with nanotip;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-03