A silicon vibration sensor for tool state monitoring working in the high acceleration range-Reference-Cited by-同舟云学术

A silicon vibration sensor for tool state monitoring working in the high acceleration range

Published:2000-08 Issue:1-3 Volume:85 Page:194-201
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Thomas J.,Kühnhold R.,Schnupp R.,Ryssel H.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference20 articles.

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4. Beschleunigung per Chip gemessen;Reuber;Elektronik,1995

5. Beschleunigung per Chip gemessen;Reuber;Elektronik,1995

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