Evaluation of p-type polysilicon piezoresistance in a full-bridge circuit for surface stress sensors
Author:
Funder
CIC
NSC
Publisher
Elsevier BV
Subject
Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation
Reference20 articles.
1. Piezoresistance effect in germanium and silicon;Smith;Phys. Rev.,1954
2. Review: semiconductor piezoresistance for microsystems;Barlian;Proc. IEEE,2009
3. Silicon diffused-element piezoresistive diaphragms;Tufte;J. Appl. Phys.,1962
4. Fabrication and characterization of high-g force, silicon piezoresistive accelerometers;Ning;Sens. Actuators, A,1995
5. A silicon vibration sensor for tool state monitoring working in the high acceleration range;Thomas;Sens. Actuators, A,2000
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