Two-dimensional thermally actuated optical microprojector

Author:

Schweizer S,Cousseau P,Lammel G,Calmes S,Renaud Ph

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. MEMS: the world for optical beam manipulation;Lau;Circuits and Devices,1997

2. Electrostatic combdrive actuated micromirrors for laser beam scanning and positioning;Kiang;J. Microelectromech. Syst.,1998

3. A raster-scanning full motion display using polysilicon micromachined mirrors;Conant,1999

4. Miniature optical scanning range sensor utilising a silicon-micromachined scanner;Totani,1997

5. Two-dimensional optical scanner applying a torsional resonator with 2 degrees of freedom;Ohtuka,1995

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