Modelling the dynamic response of a micro-cantilever excited at its base by an arbitrary thermal input using Laplace transformation

Author:

Komeili M.,Menon C.

Publisher

Elsevier BV

Subject

Applied Mathematics,Modelling and Simulation

Reference30 articles.

1. Introduction to Microelectromechanical Systems Engineering;Maluf,2004

2. High-frequency thermally actuated electromechanical resonators with piezoresistive readout;Rahafrooz;IEEE Trans. Electron Devices,2011

3. Thermal actuation, a suitable mechanism for high frequency electromechanical resonators;Rahafrooz,2010

4. Mechanics of Microelectromechanical Systems;Lobontiu,2005

5. Thermally-actuated cantilever beam for achieving large in-plane mechanical deflections;Kolesar;Thin Solid Films,1999

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