Thermally-actuated cantilever beam for achieving large in-plane mechanical deflections-Reference-Cited by-同舟云学术

Thermally-actuated cantilever beam for achieving large in-plane mechanical deflections

Published:1999-11 Issue: Volume:355-356 Page:295-302
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Kolesar Edward S,Allen Peter B,Howard Jeffery T,Wilken Josh M,Boydston Noah

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference39 articles.

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5. G.K. Fedder, R.T. Howe, Proc. IEEE Micro Electro Mechanical Systems Workshop, Nara, Japan, January 30–February 2, 1991, p. 63

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