High aspect-ratio polysilicon micromachining technology-Reference-Cited by-同舟云学术

High aspect-ratio polysilicon micromachining technology

Published:2000-12 Issue:1-2 Volume:87 Page:46-51
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Ayazi Farrokh,Najafi Khalil

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. High Density Vertical Comb Array Microactuators Fabricated Using a Novel Bulk/Poly-Silicon Trench Refill Technology;Selvakumar,1994

2. Milli-Scale Polysilicon Structures;Keller,1994

3. Polysilicon Suspensions for Magnetic Disk Drives;Stupar,1999

4. High Aspect-Ratio Polysilicon Micromachining Technology;Ayazi,1999

5. Recent advances in silicon etching for MEMS using the ASE Process;Hynes;Sens. Actuators, A,1999

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