Thermal investigation of micro-filament heaters

Author:

Fürjes P.,Vizváry Zs.,Ádám M.,Morrissey A.,Dücső Cs.,Bársony I.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. I. Bársony, M. Ádám, S.D. Kolev, Cs. Dücső, É. Vázsonyi, I. Szabó, A. van den Berg, Fast, efficient bulk micro-machined heater for integrated sensor applications, EUROSENSORS XII, Southampton, September 13–16, 1998, in: Proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications, Vol. 2, 1998, pp. 905–908.

2. Cs. Dücső, É. Vázsonyi, M. Ádám, I. Bársony, J.G.E. Gardeniers, A. van den Berg, Porous silicon bulk micromachining for thermally isolated membrane formation, in: Proceedings of the Conference EUROSENSORS X, Vol. 1, Leuven, Belgium, September 9–12, 1996, p. 227, Sensors and Actuators A 60 (1997) 235–239.

3. MEMS Material Database: http://mems.isi.edu/mems/materials/materials.cgi.

4. Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications;Fung;Sensors and Actuators A,1996

5. R.P. Mamginell, D.A. Rosato, D.A. Benson, G.C. Frye-Mason, in: Proceedings of the Conference on Finite Element Modeling of a Microhotplate for Microfluidic Application, MEMS’99, San Juan, Puerto Rico, 1999.

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