Author:
Sedky Sherif,Witvrouw Ann,Baert Kris
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. Experimental determination of the maximum post-processing temperature of MEMS on top of standard CMOS wafers;Sedky;IEEE Trans. Electron Devices,2001
2. Maxtech International, Inc., Thin-film ferroelectric struggles in world of μBol, Infrared Imaging News 6 (9) (2000) 5.
3. VHF free-free beam high-Q micromechanical resonators;Wang;J. Microelectromech. Syst.,2000
4. Rapid thermal annealing of polysilicon thin films;Zhang;J. Microelectromech. Syst.,1998
5. S. Sedky, P. Fiorini, M. Caymax, A. Verbist, C. Baert, Thermally insulated structures for IR bolometers, made of polycrystalline silicon germanium alloys, in: Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators, Digest of Technical Papers, Vol. 1525, IEEE, New York, 1997, USA, pp. 237–240.
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