Rapid thermal annealing of polysilicon thin films-Reference-Cited by-同舟云学术

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Rapid thermal annealing of polysilicon thin films

Published:1998 Issue:4 Volume:7 Page:356-364
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Xin Zhang ,Tong-Yi Zhang ,Man Wong ,Yitshak Zohar

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx4/84/15820/00735342.pdf?arnumber=735342

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