A high-frequency, high-stiffness piezoelectric actuator for microhydraulic applications

Author:

Roberts David C.,Li Hanqing,Steyn J.Lodewyk,Turner Kevin T.,Mlcak Richard,Saggere Laxminarayana,Spearing S.Mark,Schmidt Martin A.,Hagood Nesbitt W.

Funder

Office of Naval Research

Defense Advanced Research Projects Agency

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. N.W. Hagood, D.C. Roberts, L. Saggere, M.A. Schmidt, S.M. Spearing, K.S. Breuer, R. Mlcak, J.A. Carretero, F. Ganji, H.Q. Li, K.S. Chen, Y.H. Su, S. Pulitzer, Development of micro-hydraulic transducer technology, in: Proceedings of the 10th International Conference on Adaptive Structures and Technologies, Technical Digest, Paris, France, 11–13 October 1999, pp. 71–81.

2. D.C. Roberts, O. Yaglioglu, J.A. Carretero, Y.H. Su, L. Saggere, N.W. Hagood, Modeling, design, and simulation of a piezoelectrically driven microvalve for high pressure, high frequency applications, in: Proceedings of the Eighth Annual International Symposium on Smart Structures and Materials, Technical Digest, Newport Beach, CA, 4–8 March 2001.

3. H.Q. Li, D.C. Roberts, J.L. Steyn, K.T. Turner, J.A. Carretero, O. Yaglioglu, Y.H. Su, L. Saggere, N.W. Hagood, S.M. Spearing, M.A. Schmidt, A high frequency high flow rate piezoelectrically driven MEMS micropump, in: Proceedings of the Solid State Sensor and Actuator Workshop, Technical Digest, Hilton Head, SC, 4–8 June 2000, pp. 69–72.

4. Novel micropump design with thick-film piezoelectric actuation;Koch;Meas. Sci. Technol.,1997

5. R.L. Bardell, N.R. Sharma, F.K. Forster, M.A. Afromowitz, R.J. Penney, Designing high-performance micro-pumps based on no-moving-parts valves, in: Proceedings of the 1997 ASME International Mechanical Engineering Congress and Exposition on Microelectromechanical System (MEMS): 1997 Micromechanical Systems Microscale Energy Transport, ASME, New York, 1997, pp. 47–53.

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